In this section, you can access to the latest technical information related to the FUTURE project topic.

APPARATUS FOR PROCESSING SEMICONDUCTOR WAFERS, IN PARTICULAR FOR CARRYING OUT A POLYMERS REMOVAL PROCESS STEP

An apparatus for processing semiconductor wafers includes at least a wet bench and an automatic handling system of a wafer carrier removably connected thereto. The wet bench includes a first processing tank, a second processing tank and a third processing tank, separated from one another, each processing tank being dedicated to a different chemical, as well as a special cleaning and drying tank for processing the automatic handling system when the wafer carrier has been removed.


» Number: US2016079097A1 (A1)

» Publication Date: 16/03/2016

» Applicant: ST MICROELECTRONICS SRL?[IT]

» Inventor: TENAGLIA DARIO?[IT]; CALI SEBASTIANO?[IT]

» More Information

« Go to Technological Watch



AIMPLAS Instituto Tecnológico del Plástico

C/ Gustave Eiffel, 4
(València Parc Tecnològic) - 46980
PATERNA (Valencia) - SPAIN

PHONE

(+34) 96 136 60 40

EMAIL

Project Management department - Sustainability and Industrial Recovery
life-future-project@aimplas.es